Home > Term: Micro-Electric Mechanical System (MEMS)
Micro-Electric Mechanical System (MEMS)
A technology that embeds mechanical devices such as fluid sensors, mirrors, actuators, pressure and temperature sensors, vibration sensors and valves in semiconductor chips.
- Sõnaliik: noun
- Valdkond/domeen: Software
- Category: Globalization software service
- Company: IBM
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